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Products Mass Flow Controllers Metal Sealed EtherCAT® GF100 Series
Questions? Call 1-888-554-3569

The Fastest and Most Accurate MFCs

Enhanced with the Speed of EtherCAT®
Models GF100 / GF101 / GF120 / GF120XHT / GF120XSD / GF120XSL / GF121 / GF125 / GF126
Brooks Instrument Addressing Flow Bursts with Mass Flow Controller Zero Leak-by Valve Technology

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569


For pricing information:

Request a Quote
EtherCAT® GF100 Series Flyer

Performance Perfected for Semiconductor Processes

  • Embedded diagnostics leverage real-time EtherCAT® data acquisition capabilities
  • Ultra-stable flow sensor (≤ 0.15% of S.P. drift per year) enables tighter low set point accuracy and reduces maintenance requirements
  • Improved valve shutdown (≤ 0.15% of bin range) reduces valve leak-by to reduce first wafer effects
  • Newly enhanced pressure transient insensitivity reduces crosstalk sensitivity for consistent mass flow delivery

Features

  • Long-term zero stability of <±0.15% full scale per year
  • Settling times: 300 ms - <1 second
  • Full-scale flow rates up to 300 slpm
  • All-metal seal flow path: option for 5µ or 10µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures 
  • MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
  • GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
  • GF120xHT high-temperature mass flow controller can withstand operating environments of up to 150°C

Benefits

  • Exceptional performance
    • Rapid reaction times improve application efficiency
  • Flexible topology
    • Virtually limitless network topology possible
  • Simple and robust
    • Configuration, diagnostics, and maintenance
  • Affordability
    • Standard Ethernet port

Applications

  • Semiconductor etch tools
  • Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
  • Physical vapor deposition (PVD) systems
  • Epitaxial process systems
  • Advanced strip processes
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Product Type

Mass Flow Controller

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Differentiator

EtherCAT Communication

High Purity/Ultra-High Purity

Embedded Diagnostics

Ultra-stable Flow Sensor

Improved Valve Shutdown

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Performance
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Flow Range (Full Scale Capacity)

Standard GF Series: 3 sccm - 55 slm

High Flow GF Series: 55 slm - 300 slm

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Accuracy

Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%

High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35%

{5B41E208-F4F0-4FC0-9111-CD17A8732770}
Repeatability
< ±0.15% S.P.
{DD758BDD-DC5E-4D81-B070-C51FEA9BEA18}
Response Time

Normally Closed Valve: 300 ms - < 1 sec

SDS Gas Delivery: < 3 sec

High-Temperature Model: < 1 sec

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Response Time

Normally Open Valve: <1.5 sec (specific models)

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Pressure Transient Insensitivity

Specific models

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Multi-Gas & Range Configurability
MultiFlo™ Standard (most models)
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Control Range

Standard GF Series:  2-100%

High Flow GF Series: 5-100%

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Number of Bins

Standard GF Series: 11 bins

High-Flow GF Series: 4 bins

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Valve Shut Down

Standard GF Series: < 0.15% F.S.

High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out

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Zero Stability

< ±0.15% F.S. per year

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Flow Temperature Coefficient

Span: 0.05% S.P. per °C

Zero: 0.005% F.S. per °C

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Mechanical
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Seal Material
Metal
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Level of Purity / Surface Finish

5 - 10µ inch Ra

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Wetted Materials

SEMI F20 HP/UHP Compliant

316L VIM/VAR

Hastelloy C-22

316L Stainless Steel

304 Stainless Steel

KM-45

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Valve Options

Normally Closed

Normally Open (specific models only)

Meter (no valve)

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Ratings
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Max Temperature
150oC
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Differential Pressure Range

3-860 sccm = 7-45 psid

861-7200 sccm = 10-45 psid

7201-55000 sccm = 15-45 psid

51 slm-300 slm = 30-90 psid

SDS Models 10 Torr- 30 psid typical

*Typical pressure drops. Contact Brooks Technical Support for more information.

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Max Pressure

Standard GF Series: up to 500 psia max

High Flow GF Series: 75 psig (controller), 150 psig (meter)

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Leak Integrity
1x10-10 atm cc/sec He
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Diagnostics & Display
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Diagnostic Capability
Available

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Status Lights

Run

Error

Power

Network Status

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Alarms

Control Valve Output

Network Interruption

Temperature High/Low

Pressure High/Low

Power Surge/Sag

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Diagnostic / Service Port

Micro USB

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Display

Top Mount Integrated LCD

Viewing Angle: Fixed

Viewing Distance: 10 feet

Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)

Resolution: 0.1 (unit)

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Electrical
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Analog Communication

—

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Digital Communication

EtherCAT®

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Electrical Connection

Power via 5-pin M8 Connector, EtherCAT via twin RJ45

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Power Supply / Consumption

24 Vdc, 7 Watts

(Under typical operating conditions)

GF100 GF101 GF120 GF120XHT GF120XSD GF120XSL GF121 GF125 GF126
Differentiator

High Purity

High Purity

High Flow Rate

Ultra-High Purity

Ultra-Fast Response Time

High-purity flow path

Outstanding performance and reliability for high-temperature applications up to 150°C

Remote electronics offered with DIN rail mounting

SDS Gas Delivery

SDS Gas Delivery

Ultra-High Purity

High Flow Rate

Ultra-High Purity

Ultra-Fast Response

Pressure Transient Insensitivity

High Flow Rate
Flow Range (Full Scale Capacity) 3 sccm - 55 slm

55 slm - 300 slm

 3 sccm - 55 slm 50 sccm - 5 slm >25 sccm - 1 slm 4 - 25 sccm

55 slm - 300 slm

 3 sccm - 55 slm

55 slm - 300 slm
Surface Finish 10µ inch Ra 10µ inch Ra

5µ inch Ra

 5µ inch Ra avg

5µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra
Accuracy

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% SP >35-100%

±0.35% FS 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%
Repeatability < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.

5-100% = ±0.15% S.P.

2-5% = ±0.015% F.S.

< ±0.15% S.P.

< ±0.15% S.P.

 < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.
Response Time

Normally Closed

<1 sec

Normally Closed

<1 sec

Normally Closed

700 ms

Normally Closed

<1 sec

Normally Closed

<3 sec

Normally Closed

<3 sec

Normally Closed

<1 sec

Normally Closed

300ms - <700ms

 

Normally Closed

<1 sec

 
Response Time

Normally Open

<1.5 sec

Normally Open

—

Normally Open

<1.5 sec

Normally Open

—

Normally Open

—

Normally Open

—

Normally Open

—

Normally Open

<1.5 sec

Normally Open

—
Multi-Gas & Range Configurability MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard — — — MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard
Pressure Transient Insensitivity — — — — — — —

±5% S.P. up to 5 psi/sec upstream press. spike

Ability to measure inlet pressure
Diagnostic Capability

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights: MFC Health & Network Status

Alarms: Control Valve Output & Network Interruption

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms
Digital Communication

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT
Filename File Type Documents By Language
Flyer pdf English
Data Sheet GF100 EtherCAT pdf English
Data Sheet GF120xHT pdf English
Installation & Operation Manual pdf English
EtherCAT® Supplemental Manual - GF1xx pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: GF125 -WX - E0 - STEP

Model Series
   Fitting   Connector
 GF1xx   CX - 1-1/8” body width, 92 mm C Seal
   E0 - EtherCAT® via twin RJ45, Power via 5-pin M8 connector
    VX - 1-1/2” body width, 124mm 1/4” VCR male
    WX - 1-1/8” body width, 92mm W Seal

0250 Series
0250 Series
Controls and powers up to 4 devices
MultiFlo™ Configurator
MultiFlo™ Configurator
A comprehensive gas database enabling you to configure your MultiFlo™ capable MFC for thousands of gas types and ranges without removing it from the gas line.