Skip To Content
Products Mass Flow Controllers Elastomer Sealed SLA5800 Series
Questions? Call 1-888-554-3569

SLA5800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Advance and simplify your mass flow control.
Models SLA5850 / SLA5851 / SLA5853 / SLA5860 / SLA5861 / SLA5863

Imagine choosing just one mass flow controller platform to handle fourteen different pressure or flow rates going into a single process. All while delivering the exact same, ultra-precise and repeatable output on the other side. That’s the advanced simplicity you get with the SLA5800 Series digital mass flow controllers and meters.

The SLA5800 Series features the high accuracy, high zero stability and high repeatability you expect from the industry leader in mass flow measurement and control technology. Engineered with a superior design - and manufactured with advanced metrology and test systems - the SLA5800 digital MFC offers a better zero drift specification than competitive products. SLA5800 has been proven to maximize production uptime and reduce maintenance and machine downtime costs. 

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569


For pricing information:

Request a Quote
SLA5800 Series Data Sheet

Features

  • ISO/IEC 17025 accredited
  • SLA Series Biotech MFC offers two options packages with features created specifically to improve bioprocessing performance. See which package is right for your process.
  • Long-term zero stability of <0.2% full scale per year
  • Excellent accuracy backed by traceable calibration standards
  • Wide range of flow ratings - from 0.003 up to 2500 lpm
  • Highest pressure ratings - up to 1500 psi/100 bar (optional: 4500 psi/310 bar)
  • Programmable multi-gas/multi-range capabilities
  • Independent & easily accessible diagnostic/service port
  • Broad array of available communication options now includes EtherNetIP™ and PROFINET which feature a web-based interface that lets you easily configure network settings.
  • Modular design is easy-to-service at the factory or in the field

Benefits

  • ISO/IEC 17025 certification and calibration available with flow accuracy of ±0.6% of SP
  • Enhanced valve shut-off, wide turndown, certifications and approvals (USP Class VI/ADI-free) for all elastomeric material in the MFC’s gas stream (wetted path) including valve seats and o-rings available with the SLA Series Biotech MFC
  • Long-term sensor stability reduces maintenance and periodic recalibration requirements, reducing total cost of ownership
  • Proprietary Brooks Instrument thermal sensing technology delivers superior signal to noise performance for improved accuracy at low set points
  • Choose one device platform for different gases and flow ranges
  • Storage and pre-programming of up to six gas calibrations lets users easily switch between different gases and ranges on a single device, and reduces inventory
  • User-accessible service port simplifies installation, troubleshooting and diagnostic tasks without disturbing flow controller operation
  • Durable, robust metal top lid prevents damage during installation
  • EtherNet/IP™ and PROFINET permit multiple, additional diagnostics beyond those provided by the mass flow controller alone, giving users rich, real-time system information
  • Traceable calibrations to meet industry standards and regulatory requirements

Applications

  • Life sciences
  • Chemical and petrochemical catalyst research and pilot processes
  • Laboratory and analytical systems
  • Fuel cell technology

{BCA9C0AC-E96E-4B94-AE15-7B4228262145}
Product Type
Mass Flow Controller
{B246FED7-D61D-4FCD-919D-6C995CA5B0E7}
Differentiator

Wide Flow & Pressure Range

Superior Long-term Stability

High Accuracy

{CBF2CEFF-A229-420A-9035-CD04B4545A5B}
Performance
{5A23D76C-7B5E-4E89-9376-77F6304B45B9}
Flow Range (Full Scale Capacity)
.003 - 2500 slpm
{428A2EC5-4C25-4E09-81A6-545F4AB42529}
Accuracy

17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

±0.6% of SP (20-100% FS)

±0.12% of FS (<20% FS)

1100 slpm up to 2500 slpm: ±0.6% of FS


Standard Devices (includes uncertainty from reference standards

±0.9% of SP (20-100% FS)

±0.18% of FS (2-20% FS)

1100 slpm up to 2500 slpm: ±1.0% of FS

{230972BF-33D9-4EAC-955E-AA851F303FF0}
Repeatability

0.20% SP

{234FC6FF-6AB6-4E86-AA76-01D885F78CB1}
Linearity

Included in accuracy

{CC9E4BCC-488C-4071-9E07-B628DD74492B}
Response Time

0.003 - 100 slpm: <1 second

100 - 2500 slpm: <3 seconds

{ED6A2251-28D8-426E-BE29-E5A427527DA6}
Multi-Gas & Range Configurability

Standard

{D3EECBE4-E4C4-480B-B7BC-3471E980693E}
Max Pressure

.003-200 slpm: 1500 psi/103 bar

100 - 2500 slpm: 1000 psi/70 bar

Optional 4500 psi/310 bar on 50 slpm max device

{019F5616-217F-45C7-98FA-E1A1448DB24F}
Control Range

1-50 slpm: 100:1 Turndown for F.S.

50-2500 lpm: 50:1 Turndown for F.S.

{5DF8BF5E-B867-47E2-94A6-6E0B802CCE38}
Zero Stability

< 0.2% F.S. per year

{6BB26554-6972-43A0-8A21-78539BD33AA3}
Flow Temperature Coefficient

Zero: <0.05% of F.S per oC

Span: <0.1% of S.P. per oC

{2E3B7CDB-D70E-4AF0-8A17-34BE54B6ACF8}
Pressure Coefficient

0.03% per psi (0-200 psi N2)

{9F025ABC-15B3-4DBB-85B6-FA5635B987B5}
Attitude Sensitivity

<0.2% F.S. maximum deviation from specified accuracy after re-zeroing

{DA1D3822-AE0E-44BC-8119-70E5A10AB8B7}
Ratings
{61B5A28A-434C-4A06-8E5E-658CE44AFEFF}
Max Temperature
65oC
{96E514EF-F0C4-4D65-AD22-3E75349C18D7}
Differential Pressure Range

Controllers

.003 - 50 lpm: 5 psi / 0.35 bar

50 - 100 lpm: 10 psi / 0.69 bar

500 lpm: 7.5 psi / 0.52 bar

1000 lpm: 14.5 psi / 1.00 bar

2500 lpm: 35.0 psi / 2.41 bar

 

{6C910163-3A2B-4347-B4B6-797AE098760A}
Leak Integrity
1x10-9 atm cc/sec He
{E5D9B237-7A80-4A23-B2AD-757FCF6E0172}
Mechanical

{9A184087-63A6-44C5-B07E-DDAB166E24F5}
Seal Material
Elastomer Seal
{0EA6B211-0F14-4403-BC05-6C0AC667C3EB}
Wetted Materials

316L Stainless Steel

High Alloy Stainless Steel

Viton® Fluoroelastomers

Buna-N

Kalrez®

Teflon®/Kalrez®

EPDM

{AC829BE9-FFD8-4858-AE7C-D1D90864D3EA}
Valve Options

Normally Closed

Normally Open

Meter (no valve)

{413CB4D8-5055-468B-8E26-89970F8257E1}
Diagnostics

{0B728A39-317A-400A-8386-1EA9B8CBB704}
Diagnostic Capability
Available

{E0456E94-5D71-4AFD-B438-3EB3CF5ACE74}
Status Lights

MFC Health, Network Status

{3EBB4410-630B-4429-80F1-36DE58FDE1D1}
Alarms

Sensor Output

Control Valve Output

Over Temperature

Power Surge/Sag

Network Interruption

{2D5F0044-413E-49D3-8114-0AADBDBD69A8}
Diagnostic / Service Port
RS485 via 2.5mm jack

{1E73D34A-5790-43A8-A62A-A4B150C28FFD}
Electrical

{7E36C0F3-2B6D-4140-88CB-93D8102240B1}
Analog Communication

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

{ED592BD2-3896-4E5A-9F82-971C781283FE}
Digital Communication
DeviceNet™
EtherCAT®
EtherNet/IP™
Profibus®
PROFINET
RS-485 
{891ECC5C-09D5-4C00-BFAD-6C5F5863A253}
Electrical Connection

DeviceNet™: 1xM12 with threaded coupling nut (B)

EtherCAT®, EtherNet/IP™: 1x5-pin M8 with threaded coupling nut/2xRJ45

Profibus®: 1x15-pin Male Sub-D/1x9-pin female Sub-D

RS485: 1 x 15-pin Male Sub-D, (A)

{2ACAC3B8-6D09-4358-AB61-0C5492CAE460}
Power Supply / Consumption

Analog / Profibus® / RS-485

Valve Orifice > 0.032": 8 Watts

Valve Orifice ≤ 0.032": 5 Watts

Without Valve: 2 Watts

DeviceNet™ / EtherNet/IP™

Valve Orifice > 0.032": 10 Watts

Valve Orifice ≤ 0.032":  7 Watts

Without Valve: 4 Watts (DeviceNet™), 3 Watts (EtherNet/IP™)

EtherCAT®

Valve Orifice > 0.032": 8.5 Watts

Valve Orifice ≤ 0.032": 5.5 Watts

Without Valve: 2.5 Watts

{79F2EC4C-FB0C-4DF7-A2B4-CA70E0EC31A7}
Compliance
{AD8FC90E-B0D9-487F-8EC6-4D24857161A8}
Certifications/Approvals

ISO/IEC 17025:2005
CE: EMC Directive 2014/30/EU
Directive 2011/65/EU

UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22

ATEX: II 3 G Ex nA IIC T4 Gc

IECEx: II 3 G Ex nA IIC T4 Gc

KOSHA: Ex nA IIC T4

{F058B188-C1EE-4978-A425-FDD3B2E17B2E}
Environmental Compliance

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

{81B573EB-B510-4FC1-8696-780E74843FAD}
Size
Medium
SLA5850 SLA5851 SLA5853 SLA5860 SLA5861 SLA5863
Product Type Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Meter Mass Flow Meter Mass Flow Meter
Differentiator

Controller

Flow Range

Controller

Flow Range

Controller

Flow Range

Meter

Flow Range

Meter

Flow Range

Meter

Flow Range

Flow Range (Full Scale Capacity) 0.003 - 50 slpm 15 - 150 slpm 100 - 2500 slpm 0.003 - 50 slpm 15 - 150 slpm 100 - 2500 slpm
Max Pressure

1500 psi / 103 bar

Optional 4500 psi / 310 bar

 1500 psi / 103 bar 1000 psi / 70 bar

1500 psi / 103 bar

Optional: 4500 psi / 310 bar

 1500 psi / 103 bar 1000 psi / 70 bar
Accuracy

±0.6% of SP

±0.6% of SP

±0.6% of SP

1100 slpm up to 2500 slpm: ±0.6% of FS

±0.6% of SP

±0.6% of SP

±0.6% of SP

1100 slpm up to 2500 slpm: ±0.6% of FS
Repeatability 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P. 0.20% S.P.
Response Time <1 second <1 second <3 seconds <1 second <1 seconds

<3 seconds
Multi-Gas & Range Configurability Standard Standard Standard Standard Standard Standard
Diagnostic Capability

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack

Status Lights - MFC Health , Network Status

Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic/Service Port - RS485 via 2.5 mm jack
Analog Communication

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA

0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA
Digital Communication

DeviceNet™

EtherCAT® 

EtherNet/IP™

Profibus®

PROFINET

RS-485

DeviceNet™

EtherCAT® 

EtherNet/IP™

Profibus®

PROFINET

RS-485

DeviceNet™

EtherCAT® 

EtherNet/IP™

Profibus®

PROFINET

RS-485

DeviceNet™

EtherCAT® 

EtherNet/IP™

Profibus®

PROFINET

RS-485

DeviceNet™

EtherCAT® 

EtherNet/IP™

Profibus®

PROFINET

RS-485

DeviceNet™

EtherCAT® 

EtherNet/IP™

Profibus®

PROFINET

RS-485
Filename File Type Documents By Language
Data Sheet pdf English Chinese French German Spanish
SLA Biotech MFC At-a-Glance pdf English Chinese German
Installation & Operation Manual pdf English
DeviceNet™ Supplemental Manual - SLA5800, SLAMf Mass Flow pdf English
EtherCAT® Supplemental Manual - SLA5800, SLAMf pdf English
EtherNet/IP™ Supplemental Manual (Prod Rev 4) pdf English
Profibus® Supplemental Manual - SLA5800, SLAMf pdf English
PROFINET Supplemental Manual - SLA5800, SLAMf pdf English German
RS485-S Supplemental Manual - SLA5800, SLAMf pdf English
Web-based Interface Supplemental Manual - SLA Series with EtherNet/IP™ or PROFINET pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: SLA5850 - 7 - 1B - 1 - A - RevB

Meter
Series

  Digital
  Communications I/O

 Mechanical Connection
  (Body size 0 & 1 only)

   Valve Type
 		  Analog
  Communications I/O
  Revision
 Level
SLA5850
   EtherNet/IP
  1B - 1/4” tube compression
    1 - Normally closed
   A -None  RevB

Filename File Type
SLA5850-1-1M-1-A-REVB zip
SLA5850-7-1B-1-A-REVB zip
SLA5850-7-1D-1-A-REVB zip
SLA5850-7-1E-1-A-REVB zip
SLA5850-7-1F-1-A-REVB zip
SLA5850-7-1G-1-A-REVB zip
SLA5850-7-1M-1-A-REVB zip
SLA5850-7-5A-1-A-REVB zip
SLA5850-8-1A-1-A-REVB zip
SLA5850-8-1B-1-A-REVB zip
SLA5850-8-1G-1-A-REVB zip
SLA5850-8-1H-1-A-REVB zip
SLA5850-8-1J-1-A-REVB zip
SLA5850-8-E1-1-A-REVB zip
SLA5850-8-E1-5-A-REVB zip
SLA5850-8-L1-5-A-REVB zip
SLA5850-A-1B-1-C-REVB zip
SLA5850-A-1E-1-B_REVB zip
SLA5850-D-1E-1-A-REVB zip
SLA5850-D-1L-1-A-REVB zip
SLA5850-E-1E-1-A-REVB zip
SLA5850-E-H1-1-A-REVB zip
SLA5850-P-1B-1-A-REVB zip
SLA5850-S-1B-1-C-REVB zip
SLA5850-S-1C-1-C-REVB zip
SLA5850-S-1C-4-C-REVB zip
SLA5850-S-1E-1-C-REVB zip
SLA5850-S-1G-1-C-REVB zip
SLA5850-S-1G-4-0_REVB zip
SLA5850-S-1H-1-C-REVB zip
SLA5850-S-1H-4-C-REVB zip
SLA5850-S-1J-1-C-REVB zip
SLA5850-S-1P-1-B-REVB zip
SLA5850-S-1P-1-C-REVB zip
SLA5850-S-5A-1-C-REVB zip
SLA5850-S-5B-1-B-REVB zip
SLA5850-S-E1-1-B-REVB zip
SLA5850-S-E1-1-C-REVB zip
SLA5850-S-G1-4-C-REVB zip
SLA5851-7-1B-1-A-REVB zip
SLA5851-7-1D-1-A-REVB zip
SLA5851-7-1E-1-A-REVB zip
SLA5851-7-1F-1-A-REVB zip
SLA5851-7-1G-1-A-REVB zip
SLA5851-7-1L-1-A-REVB zip
SLA5851-7-1P-1-A-REVB zip
SLA5851-7-5A-1-A-REVB zip
SLA5851-8-1A-1-A-REVB zip
SLA5851-8-1B-1-A-REVB zip
SLA5851-8-1D-1-A-REVB zip
SLA5851-8-1G-1-A-REVB zip
SLA5851-8-1H-1-A-REVB zip
SLA5851-8-1T-1-A-REVB zip
SLA5851-8-5A-1-A-REVB zip
SLA5851-8-L1-1-A-REVB zip
SLA5851-8-L1-5-A-REVB zip
SLA5851-A-1B-1-C-REVB zip
SLA5851-D-1E-1-A-REVB zip
SLA5851-D-1L-1-A-REVB zip
SLA5851-D-E1-1-A-REVB zip
SLA5851-D-E1-5-A-REVB zip
SLA5851-E-1E-1-A-REVB zip
SLA5851-E-1L-1-A-REVB zip
SLA5851-P-1B-1-A-REVB zip
SLA5851-S-1A-1-B-REVB zip
SLA5851-S-1B-1-C-REVB zip
SLA5851-S-1B-1-L-REVB zip
SLA5851-S-1D-1-C-REVB zip
SLA5851-S-1E-1-C-REVB zip
SLA5851-S-1H-1-B-RevB zip
SLA5851-S-1J-1-C-REVB zip
SLA5851-S-1L-1-B-REVB zip
SLA5851-S-1L-1-C-REVB zip
SLA5851-S-1M-1-C-REVB zip
SLA5851-S-1P-1-B-REVB zip
SLA5851-S-1P-1-C-REVB zip
SLA5851-S-5A-1-C-REVB zip
SLA5851-S-D1-1-2-REVB zip
SLA5851-S-E1-1-B-REVB zip
SLA5851-S-P1-1-C-REVB zip
SLA5853-1-2L-2-A-REVB zip
SLA5853-1-2S-2-A-REVB zip
SLA5853-7-1A-1-A-REVB zip
SLA5853-7-2D-2-A-REVB zip
SLA5853-7-2G-2-A-REVB zip
SLA5853-7-2H-3-A-REVB zip
SLA5853-7-2K-3-A-REVB zip
SLA5853-7-2M-3-A-REVB zip
SLA5853-7-5E-2-A-REVB zip
SLA5853-8-1A-1-A-REVB zip
SLA5853-8-2B-3-A-REVB zip
SLA5853-8-2D-2-A-REVB zip
SLA5853-8-2T-2-A-REVB zip
SLA5853-8-2X-2-A-REVB zip
SLA5853-8-5E-2-A-REVB zip
SLA5853-A-2D-2-C-RevB zip
SLA5853-D-2C-2-A-REVB zip
SLA5853-D-2K-2-A-REVB zip
SLA5853-D-2M-8-A-REVB zip
SLA5853-E-2C-2-A-REVB zip
SLA5853-E-2M-2-A-REVB zip
SLA5853-E-2T-2-A-REVB zip
SLA5853-P-2E-2-C-REVB zip
SLA5853-P-2M-1-A-REVB zip
SLA5853-P-2M-2-C-REVB zip
SLA5853-P-2T-2-C-REVB zip
SLA5853-S-2C-2-C-REVB zip
SLA5853-S-2D-2-C-REVB zip
SLA5853-S-2D-3-B-REVB zip
SLA5853-S-2D-3-C-RevB zip
SLA5853-S-2E-2-C-REVB zip
SLA5853-S-2E-2-L-REVB zip
SLA5853-S-2F-2-C_REVB zip
SLA5853-S-2F-3-C-REVB zip
SLA5853-S-2G-2-B-REVB zip
SLA5853-S-2G-2-C-REVB zip
SLA5853-S-2H-3-C-REVB zip
SLA5853-S-2J-3-C-REVB zip
SLA5853-S-2M-2-B-REVB zip
SLA5853-S-2M-2-C-REVB zip
SLA5853-S-2M-3-B-REVB zip
SLA5853-S-2N-2-C-REVB zip
SLA5853-S-2P-2-C-REVB zip
SLA5853-S-2R-2-C-REVB zip
SLA5853-S-2X-2-C-REVB zip
SLA5853-S-3B-1-C-REVB zip
SLA5853-S-3B-2-C-REVB zip
SLA5853-S-3B-3-C-REVB zip
SLA5853-S-3B-4-C-REVB zip
SLA5853-S-3G-2-C-REVB zip
SLA5853-S-5C-3-C-REVB zip
SLA5853-S-5D-3-C-REVB zip
SLA5853-S-5E-2-C-REVB zip
SLA5860-7-1H-0-A-REVB zip
SLA5860-8-E1-0-A-REVB zip
SLA5860-E-1E-0-A-REVB1 zip
SLA5860-S-1A-0-1-REVB zip
SLA5860-S-1B-0-C-REVB zip
SLA5860-S-1D-0-C-REVB zip
SLA5860-S-1E-0-C-REVB zip
SLA5860-S-1G-0-B-REVB zip
SLA5860-S-1G-0-C-REVB zip
SLA5860-S-1L-0-C-REVB zip
SLA5860-S-1T-0-0-REVB zip
SLA5860-S-5B-0-C-REVB zip
SLA5860-S-C1-0-C-REVB zip
SLA5860-S-G1-0-C-REVB zip
SLA5861-E-1B-0-A-REVB zip
SLA5861-E-1E-0-A-REVB zip
SLA5861-E-1L-0-A-REVB zip
SLA5861-S-1A-0-C-REVB zip
SLA5861-S-1E-0-C-REVB zip
SLA5861-S-1H-0-C-REVB zip
SLA5861-S-1L-0-B-REVB zip
SLA5861-S-1L-0-C-REVB zip
SLA5863-7-2E-0-A-REVB zip
SLA5863-A-2M-0-C-REVB zip
SLA5863-E-2M-0-A-REVB zip
SLA5863-E-2T-0-A-REVB zip
SLA5863-S-2C-0-C-REVB zip
SLA5863-S-2E-0-B-REVB zip
SLA5863-S-2G-0-C-REVB zip
SLA5863-S-2M-0-C-REVB zip
SLA5863-S-2N-0-0-REVB zip
SLA5863-S-2R-0-C-REVB zip
SLA5863-S-2U-0-C-REVB zip
SLA5863-S-3B-0-C-REVB zip
SLA58 Cables
Access our offering of cables to connect our products to your process.
0250 Series
0250 Series
Controls and powers up to 4 devices
0260 Series
0260 Series
Controls and monitors up to 30 devices, powers up to 10 devices.
Brooks Expert Support Tool (BEST)
Brooks Expert Support Tool (BEST)
A Windows™ based application providing expanded control of Brooks Instrument MFCs and Pressure Controllers.
Brooks LabVIEW™ DLL
Brooks LabVIEW™ DLL

Enables users to set-up communication with Brooks® digital mass flow controllers, pressure controllers and secondary electronics. The DLLs are to be used when creating your own application in LabVIEW™.

Smart DDE
Smart DDE

Dynamic Data Exchange software allows user to make bi-directional links between Windows® based applications and Brooks Instrument RS485 S-Protocol devices.