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Wide-Range Vacuum Gauges

Single gauge solution for increased accuracy from atmosphere to high vacuum.

VersaTorr extends the performance of MEMS-based vacuum gauge measurement by combining advances in Micro-Pirani/Piezo sensor design with active temperature compensation and advanced digital signal processing to greatly enhance the accuracy and working range by up to 3 decades.

KEY APPLICATIONS

  • Load locks
  • Transfer chambers
  • Forelines
  • Vacuum roughing lines
  • Thin film processing

PRODUCTS

BVT100 Series
BVT100 Series
BVT200 Series
BVT200 Series
Product Type Dual Sensor: MEMS Pirani and Piezo Diaphragm Tri-Sensor: MEMS Pirani, Capacitance & Piezo Diaphragms
Differentiator

Enhanced accuracy with wide operating range for reliable pump down and base pressure measurement

Capacitance and Piezo diaphragm sensors provide extended high-accuracy direct vacuum measurement for process control

Pressure Range

7.5x10-7 Torr through 1000 Torr

7.5x10-7 Torr through 1000 Torr

Accuracy

7.5x10-5 to7.49x10-3 Torr: ±5%

7.5x10-3 to7.49 Torr: ±5%

7.50 to 7.49 Torr: ±1%

75 Torr to 1000 Torr: ≤±0.5%

7.5x10-5 to7.49x10-3 Torr: ±5%

7.5x10-3 to7.49 Torr: ±0.5%

7.50 to 7.49 Torr: ±0.5%

75 Torr to 1000 Torr: ≤±0.5%

Temperature Ambient - 50 oC Ambient - 50 oC
Analog Communication

0.5-9.5 Vdc (1V per decade)

0.5-9.5 Vdc (1V per decade)

Digital Communication

RS-232

RS-485

RS-232

RS-485