HOLIDAY HOURS: Our facilities will be closed on December 24th and 25th in observance of the Christmas holiday. Normal business hours will resume on December 26th.

Close

Skip To Content
Products Pressure & Vacuum Elastomer Sealed 5866RT
Questions? Call 1-888-554-3569

5866RT Elastomer Sealed Pressure Controller & Flow Meter

Versatility for high pressure applications across a wide flow measurement range.
Models 5866RT

The Brooks model 5866RT metal or elastomer sealed pressure controller and flow meter controls pressure while also measuring flow rate. Model 5866RT receives a remote pressure transducer signal, and using adjustable integral PID control electronics and control valve, will maintain a desired set pressure. With options in seals, electro-polished wetted surfaces and a wide pressure and flow measurement range, 5866RT delivers proven results across a broad range of processes.

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569


For pricing information:

Request a Quote
5866RT Data Sheet

Features

  • Integral pressure transducer
  • Response time: <0.8 seconds
  • Wide flow measurement range with full-scale flow rates from 0 - 3 sccm to 0 – 30,000 sccm
  • Wide range of full scale pressures (Max pressure 1500 psig)
  • Optional metal seal available
  • Electro-polished wetted surfaces (optional)
  • Electrically activated valve override
  • Suitable for upstream or downstream control
  • Analog interface

Benefits

  • Eliminates droop, hysteresis and boost
  • High leak integrity
  • More control over pressure and flow
  • Dynamic tuning adjustments with top mounted DIP switches

Applications

  • Thin-film processes
  • Chemical research
  • Petrochemical research
  • Laboratory
  • Fuel cell
  • Life science
{D2D139DD-5602-4B58-9816-25FFE744D4D2}
Product Type

Pressure Controller & Flow Meter

{AB310584-3FE7-492D-87CA-96108F8ACCDF}
Differentiator

Remote Transducer

Pressure Control & Flow Measurement

{AC33C19D-CFED-4FB8-8E50-870657C2CD34}
Performance
{8C385242-2566-4FAF-A740-01D5753AE0CB}
Flow Range (Full Scale Capacity)

Any range 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.

{08A3432B-4DED-4156-B139-A2361485EF48}
Accuracy

Flow Accuracy:

 ±1% F.S. including linearity at the calibration conditions

±1.5% F.S. for flow rates greater than 20 slm

{6F0AB09C-1A49-4DC0-8512-252CD22D1870}
Repeatability

±0.25% of rate

{2837365E-D2B2-4A0A-84A1-F8C582730702}
Flow Temperature Coefficient

0.1% F.S. per °C

{3D3D1079-6B71-4B0B-BF34-010288E854F1}
Pressure Range
Dependent upon remote pressure transducer
{278FF35E-6127-41EC-AE62-6E0126D40545}
Pressure Control Range

100:1 for a remote transducer with a 0-10 V output

{5C802199-C60E-48B1-81A4-7A451FE08512}
Response Time

Pressure Response Time:

< 0.8 sec typical for a 0-100% command step with <2% pressure overshoot.

Actual pressure response depends on system design.

{0E296DA0-3B2A-4E8F-BD53-2D1131E5AA17}
Ratings
{301DB8E0-77F0-4BDE-BD73-B077EB51A5D1}
Max Pressure
1500 psig
{26581697-E249-4174-856A-3DBDFC3C8AFC}
Temperature Range
0 - 65°C
{57A38ACC-F9BA-4DB6-9C9F-4EEA1F910994}
Leak Integrity

Inboard to Outboard

Metal Seal: 1 x 10-10 atm cc/sec He max 

Elastomer Seal: 1 x 10-9 atm cc/sec He max

{0B30E349-72C2-4CB6-9FCE-9D9D120184DD}
Mechanical
{83A68B74-F525-48A8-9301-7DD6422EC59C}
Seal Material
Elastomer or Metal
{15593491-CF95-4382-9688-9ECD63B16425}
Wetted Materials

Wetted Parts: Standard 316L/316L VAR Stainless Steel

Valve Seat: Standard Viton® fluoroelastomers or metal

External/Internal Seals: flouroelastomers or metal

Optional: Buna-N, Teflon® or Kalrez®

{E0F2EAA4-5466-434E-B0BD-32C52BD57E48}
Valve Options

Normally Closed

Normally Open

No Valve (elastomer, upstream configuration only)

{40380015-2DC3-4133-8676-AFA8CA6CC046}
Electrical
{D3FC93D9-109E-439D-A6CC-46CE2439E047}
Analog Communication

0-5 V

{DE54BDDB-3F43-4DA7-B0C0-F868F79C8A08}
Digital Communication

—

{C8DC96A5-70A5-4B4D-8B4F-A7EFA8D1B0E2}
Electrical Connection

15-Pin "D" Connector

{85136DED-F0BB-4E6E-8A95-A88EAF9B891C}
Power Supply / Consumption

Normally Closed: 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mA

Normally Open: 10.5 watts; ±15 Vdc (±5%) @ 350 mA

{A61CB646-C77E-48AD-B21D-276E5047C8BC}
Diagnostic Capability

—

{D240032C-F212-4DA6-8F89-3CC7C65700C3}
Compliance
{FB7B9B2B-6544-4FB5-B8DC-2BC43F0C6C84}
Certifications/Approvals
—
{A73C4D47-2310-42D5-9311-E43935397925}
EMC

EMC Directive 89/336/EEC EN 61326-1

{7F34FD08-D7D8-4BA7-95A1-A1530DCE90A8}
Size

Compact

5866RT
Flow Range (Full Scale Capacity)

Any range from 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.
Pressure Control Range

100:1 for a remote transducer with a 0-10 V output
Max Pressure

1500 psig
Seal Material

Elastomer or Metal Seal
Electrical Connection

15-Pin "D" Connector
Filename File Type Documents By Language
Data Sheet pdf English
Installation & Operation Manual pdf English