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Products Vacuum & Pressure Capacitance Manometers
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Capacitance Manometers for Accurate Pressure Measurement

Stable, Reliable Manometer Gauges for Critical Process Vacuum Measurement

Achieve exceptional measurement stability and reliability with Brooks Instrument high-performance capacitance manometers. Designed for the most demanding applications, these manometer gauges operate over a wide dynamic range with extremely good accuracy delivering repeatable readings over a long lifespan. Engineered for compatibility with high-purity systems and corrosive gasses, our manometers ensure minimal drift in the most critical vacuum processes.

KEY APPLICATIONS

  • Semiconductor manufacturing
  • Thin-film deposition processes – glass, web and optical coatings
  • Freeze drying perishable materials
  • Vacuum processing and deposition systems

Select the capacitance manometer that best meets your requirements.


PRODUCTS

CMC Series
CMC Series
XacTorr® CMX Series
XacTorr® CMX Series
Product Type Capacitance Manometer Capacitance Manometer
Differentiator

Unheated

Heated or Unheated

Analog or Digital

 
Pressure Range

10, 20, 50, 100 and 1000 Torr Full Scale

0.1, 1, 2, 10, 20, 100, 1000 Torr

mBar & Pascal References Available
Accuracy

Type A = 0.25% of Reading

Type B = 0.50% of Reading

CMX0: 0.25% of Reading

CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading

CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading
Temperature Ambient

CMX0 Ambient

CMX1 45°C

CMX2 100°C

CMX3 160°C

Analog Communication

0-10 Vdc (<10k Ohm load)

 0-10 Vdc 5k Ohm load
Digital Communication

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DeviceNet™

RS485
Size Compact Large