4800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Ultra-fast response for time-critical flow processes.

Models 4850 / 4860

The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. That’s the key advantage of the 4800 Series controllers and meters: An advanced MEMS-based thermal sensor, combined with a proprietary PID algorithm to optimize control valve response, makes it possible for select 4800 Series controllers to quickly match actual mass flow to any changes in set point. The optional Local Operator Interface (LOI) provides a convenient user interface to view, control, and configure the devices eliminating the need for remote secondary electronics.

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4800 Series Data Sheet

Features

Flow response time (settling time) <0.75 seconds
Innovative MEMS sensor and proprietary PID algorithm
Compact size is less than half the size of typical thermal MFCs: 1” x 3” x 4” (25 mm x 76 mm x 101 mm)
Optional Local Operator Interface (LOI) simplifies set-up and operation; free LabVIEW VI download for monitoring and zeroing the device
Digital capability via RS-232

Benefits

Well suited for wide range of common, non-corrosive gases
Fast response time ensures rapid steps during process recipe changes
Excellent for OEMs: Compact size eases integration into tight machine spaces and speeds installation
Optional Local Operator Interface (LOI) is a turnkey solution for local indication, set point control and device configuration; eliminates need for remote secondary electronics
Variety of communication options makes it easy to align with user requirements

Applications

Heat treating, cutting/welding and other thermal processes
Solar/thin film physical vapor deposition (PVD) systems
Analytical devices to measure and control reagent, calibration and sample gas flows

Product Type

Mass Flow Controller

Differentiator

Ultra-fast Response Times

Optional Local Operator Interface

Compact Size

Suitable for Non-corrosive Gases

Performance

Flow Range (Full Scale Capacity)

50 sccm - 40 slpm

Accuracy

3.0% of FS

1.0% of FS (optional)

Repeatability

0.15% FS

Response Time

Normally Closed Valve: 300 ms - <1 sec

Multi-Gas & Range Configurability

—

Control Range

2-100%

Flow Temperature Coefficient

Ratings

Temperature Range

5-50^oC (41-122^oF)

Max Pressure

150 psig/10 barg

Differential Pressure Range

3-860 sccm = 7-45 psid

861-7200 sccm = 15-45 psid

7201-55000 sccm = 25-45 psid

*Contact Brooks Technical Support for more information.

Leak Integrity

1x10^-10 atm cc/sec He

Mechanical

Seal Material

Elastomer Seal

Wetted Materials

316 Stainless Steel, Hastelloy C-22, 1707 PH,43055

Diagnostics & Display

Diagnostic Capability

Available

Electrical

Analog Communication

0-5 Vdc
4-20 mA

Digital Communication

RS232

Input / Output

0-5 Vdc, 4-20 mA, RS-232 (Standard with all analog I/O options)

Electrical Connection

Two 15-pin D-sub connectors

One for connection to the 4800 Series
One for the remote connection

Power Supply / Consumption

+15 Vdc + 10% or +24 Vdc + 10%

Optional Equipment

Local Operator Interface

P/N: 273L156ZZZ

Display Area

28mm wide x 11mm high

Max Temperature

50°C

Humidity

5 - 95% RH (ambient)

Power Adaptor

P/N: 641Z059AAA

Power Requirements

The LOI optionally includes a wall mount power adaptor with a 3.5-mm DC-plug. The adaptor works with input voltages of AC 90-240 V/47-63Hz. The adaptor supports European, U.K., Australia and U.S. wall plugs. Power can also be supplied by a remote connection via the D-connector.

Compliance

EMC

EMC Directive 2004/108/EC: per EN 61326:2006

Certifications/Approvals

ATEX Zone 2

CSA Div 2/Zone 2 (Recognized)

Environmental Compliance

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

Size

Compact

	4850	4860
Product Type	Mass Flow Controller	Mass Flow Meter
Flow Range (Full Scale Capacity)	50 sccm - 40 slpm	50 sccm - 40 slpm
Accuracy	3.0% F.S. 1.0% F.S. (optional)	3.0% F.S. 1.0% F.S. (optional)
Repeatability	0.15% F.S.	0.15% F.S.
Response Time	Normally Closed Valve: 300 ms - <1 sec	Normally Closed Valve: 300 ms - <1 sec
Max Pressure	150 psig/10 barg	150 psig/10 barg
Diagnostic Capability	Status Lights: MFC Health, Network Status Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port: RS485 via 2.5 mm jack	Status Lights: MFC Health, Network Status Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port: RS485 via 2.5 mm jack
Analog Communication	0-5 Vdc 4-20 mA	0-5 Vdc 4-20 mA
Digital Communication	RS232	RS232

Filename	File Type	Documents By Language
Data Sheet	pdf	English
Installation & Operation Manual	pdf	English
Installation & Operation Manual - Local Operator Interface	pdf	English
Profibus® Supplemental Manual - 4800	pdf	English
RS232 Supplemental Manual - 4800	pdf	English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: 4850 - B1 - 2 - STEP

Meter Series	Mechanical Connections	Accessories
4850	1A - 9/16” -18unf straight thread	0 - None
	B1 - 1/4” tube compression w/filter	1 - LOI w/Power Adapter
	C1 - 1/8” tube compression w/filter	2 - LOI w/o Power Adapter
	D1 - 3/8” tube compression w/filter

Filename	File Type
4850-B1-2	STEP
4850AB-B1-2	DXF
4850AB-B1-2	STEP

0250 Series

Controls and powers up to 4 devices

4800 Series Software

Monitor flow and perform basic functions.

4800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

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