Beta Software

Overview

The software or databases downloaded from this page are beta releases and have been rapidly developed based on requested features or fixes from users. For example, new gas configurations can be available in just a few days (where gas properties data are available).

Due to this rapid deployment methodology, all beta software on BrooksInstrument.com is downloaded at the risk of the user.

We encourage users to provide feedback on this software before final release by sending an email via this link: Rob.Crane@BrooksInstrument.com

Documentation

Filename	File Type	Documents By Language
Quick Start Guide	pdf	English

Versions

Beta GP200 Embedded Gas Database V402

Updates:

Added LP Bin Table for 12 (HF)

Beta GP200 Embedded Gas Database #2628001

Updates:

Added CT Bin Gases: 566 (10% F₂/He), 677 (20% F₂/He), 963 (20% F₂/N₂), 980 (20% F₂/Ar)
Added LP Bin Gases: 418 (C₅F₁₂)

Beta GP200 Embedded Gas Database V401

Beta Brooks Expert Support Tool (BEST) V5.13.9.16

A full released version of this software, V5.14.0.0, is available via the BEST software page.

Beta FloCom Database db240125

Updates:

Added gas phosphorus pentafluoride, PF₅, for GF1xxx MultiFlo

Beta FloCom Database db190220

Featuring:

The following gases/mixtures have been added to the database: SEMI Gas Code 1055

Beta FloCom Database db180712

Featuring:

The following gases/mixtures have been added to the database: SEMI Gas Code 1050

Beta Software

Overview

Documentation

Versions

Beta GP200 Embedded Gas Database V402

Beta GP200 Embedded Gas Database #2628001

Beta GP200 Embedded Gas Database V401

Beta Brooks Expert Support Tool (BEST) V5.13.9.16

Beta FloCom Database db240125

Beta FloCom Database db190220

Beta FloCom Database db180712

Beta MultiFlo Configurator V5.35.01

Beta MultiFlo Configurator Setup V5.36

Beta VDM300 WARP

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